imec,一名着名的纳米电子研究中心和尖端半导体晶片产品和服务设计和制造的关键参与者,宣布促进了氮化镓 - 硅(GaN-On-Si)技术的战略合作。
在高温(150◦C)正向和反向二极管电流。二极管的阳极宽度为10mm,阳极-阴极距离为10µm (Credit: imec)。
GaN技术有助于制造比硅更快的开关电源器件,具有更低的导通电阻和更高的击穿电压。这使得它成为精密电力电子元件的首选材料。该合作建立在最近一个项目中取得的令人鼓舞的成果之上,imec与IQE合作,使用其专有的二极管架构和IQE的高压外晶片生产GaN功率二极管。
IQE joins imec’s GaN-on-Si Industrial Affiliation Program, which is involved in joint research and development on GaN-on-Si 200 mm epitaxy and enhancement mode device technology with a number of companies such as IDMs, fabless design houses, material and equipment suppliers, and packaging companies. The program also incorporates research activities on novel substrates to enhance the quality of epitaxial layers, development of sophisticated vertical devices, and new isolation modules to improve integration levels. IQE, being a GaN-on-Si Program partner, gets access to advanced epitaxy, devices and power electronics processes, which include imec’s entire 200 mm CMOS-compatible GaN process line.
我们很高兴有机会通过产业合作计划与imec扩大合作关系。氮化镓对硅的重要性是不可低估的,特别是当我们进入了一个电动交通的时代,以及对需要高电压和高功率能力的高效能源控制系统的需求不断增加的时候。IQE在开发和制造GaN基外晶片方面的可靠记录,加上imec在纳米电子领域无可置疑的世界领先的研究声誉,使得IQE在这个快速增长的技术空间中形成了强有力的合作。
韦恩约翰逊,电力业务部门,IQE
IMEC在与IQE的早期协作项目中创建了先进的GaN电力二极管。研究中心的专有门控边缘终止(GET)肖特基二极管器件架构已应用于IQE的高压GaN缓冲器,超过200 mm Si基板。获取能够同时显示电压低电平和低漏电流的设备是电源二极管的主要挑战。The large (10mm) GaN power diodes that were produced in the 200 mm Si pilot line of imec demonstrated a low turn-on voltage and low leakage current of up to 650 V, thanks to imec’s GET diode device architecture and IQE wafers’ low buffer leakage current. The power Schottky diodes advance further and reverse specifications all through the complete temperature range of 25-150˚C with a tight distribution.
我们对与IQE的战略伙伴关系感到兴奋。我们的联合结果表明,IQE外晶片质量优良,排列整齐,满足功率肖特基二极管的规格。我们期待与IQE合作,以推进我们有前景的结果,这表明我们专有的GET肖特基二极管器件架构和工艺技术可以转移到IQE提供的外部晶圆。我们的200mm GaN-on-Si工艺可用于我们的项目合作伙伴,并为满足合作伙伴的特定产品需求而设计。
鲁迪Cartuyvels,执行副总裁,智能系统和能源技术,IMEC