TheHiden通过引入新的光束光学和离子源配置，进一步增强了IG20高光泽气离子枪，从而使束亮度和梁的对比度增加，并显着降低了最终点大小。
With a raster scanning area of 4x4mm the IG20 is equally suited to depth profiling and to surface imaging applications, and is the preferred gas ion gun for secondary ion and secondary neutral mass spectrometry, for Auger and for XPS. Parameter selection and gun operation are fully under PC control, and the gun is operable with both oxygen and with inert gas primary sources.
Two interchangeable ion sources are available for operation with the same beam optic configuration. One is optimised for general analysis with maximum brightness and a beam current of 800nA, one is optimised for high dynamic range depth profiling applications with minimised beam scatter and supporting a beam current of 200nA within a beam diameter of just 80 micron.
The IG20 ion gun is differentially pumped and includes full raster scanning, incorporation of a neutrals dump, DN-35-CF(2.75 inch diameter) Conflat-type mounting flange and simple replacement of the ion source yttria-coated iridium twin-filament. Companion products include the IG-5C metal ion gun with caesium source and a choice of quadrupole SIMS detectors
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