布鲁克今天宣布,已获得110万美元的合同,以提供定制的N8 Titanos大型原子力显微镜(AFM)National Institute of Standards and Technology (NIST)。NIST的精密工程部(PED)将在其制造工程实验室使用该仪器,其主要重点是需要可追溯的AFM(T-AFM)的计量应用。
T-AFM仪器将为NIST提供基本可追溯的纳米级长度计量,该计量为诸如半导体制造,光学和光子学,数据存储和生物医学等行业的客户提供服务。该仪器将安装在NIST的MD设施中,并将用于测量各种参数,例如高度,音高表面粗糙度和线宽度粗糙度。一项要求是可以追溯到仪表的SI(国际单位系统)定义的板载计量,该定义是通过激光干涉使用633 nm波长碘稳定的He-ne激光器在所有三个轴上实现的。
布鲁克's next generation N8 TITANOS was announced in December 2009. The system is designed to provide highest stability and precision in surface measuring applications down to atomic resolution. The single-plane architecture with rigid granite base provides significant advantages over multi-component metal translation systems. The N8 TITANOS can accommodate samples of up to 300 mm x 300 mm size, and can be equipped with additional inspection techniques, such as optical microscopy. Its AFM performance with lowest noise level (RMS (Z) < 0.05 nm) can provide highest-quality results for metrology measurements.
Dr. Frank Saurenbach, Bruker Nano Vice President for AFM, commented: "Bruker Nano has many years of experience in traceable AFM for metrology purposes. We have already supplied a similar instrument to the Physikalisch-Technische Bundesanstalt (PTB), NIST's German counterpart. This system has been in service for 6 years, providing excellent results. We are delighted to have won this important NIST order, demonstrating Bruker's ability to design and manufacture highest performance AFM products."
AFM Bruker Nano首席技术官Hans-Achim博士补充说:“我们期待NIST的PED受益于N8 Titanos的性能的各种额外改进。提供最高准确性和精度的可追溯的AFM结果。”