Jan 7 2010
Oxford Instruments Plasma Technology (OIPT)announces a significant boost in the demand for its Ionfab Ion Beam Etch and Deposition tools, with 2009 being the best year ever for sales of these systems. Orders for this flexible and versatile tool have been received both for R+D and production applications, from a range of customers worldwide.
These include Ionfab system sales to King Abdullah University of Science and Technology (KAUST) in Saudi Arabia, for R&D; Chalmers University of Technology in Sweden for ultra low temperature R&D etch; CEA LETI, Grenoble, France for R&D; and from a major manufacturer in China for an Ionfab500 System to undertake medium batch optical coating production.
Oxford Instruments' Ionfab tool allows the flexibility to perform etch and /or deposition and consequently maximises system utilisation. Its specifications can be closely tuned to applications, enabling faster and repeatable process results, and offers functionality in multiple modes: Ion Beam Etching (IBE), Reactive Ion Beam Etching (RIBE), Chemical Assisted Ion Beam Etching (CAIBE), Ion Beam Sputter Deposition (IBSD) and Ion Assisted Sputter Deposition (IASD).
“ OIPT是我们技术领域中为数不多的公司之一，不仅可以度过经济衰退，而且还显着增长。我们的产品和流程组合的实力意味着我们能够为客户提供满足他们的需求的优势技术”，OIPT的销售和客户服务总监Mark Vosloo的评论：“这些离子Fab离子光束系统都是为从研发到生产，蚀刻和沉积的单个客户应用程序构建的。我们的多功能性以及出色的均匀性和流程结果，意味着那意味着该功能OIPT越来越成为离子光束系统首选的供应商。”