Horiba Scientific, the leading manufacturer of spectroscopic ellipsometers for research and industry, offers an advanced thin film characterization platform called DeltaPsi2. The software applies to ellipsometry, polarimetry and reflectometry and controls all HORIBA Scientific thin film metrology instruments.
Deltapsi2软件提供了高级测量，建模和报告功能，以精确，灵活地表征薄膜结构。
Features include calculation of thicknesses, optical constants, gradients, anisotropy, alloy composition, bandgap calculation, surface roughness, EMA, backside corrections, multi combined measurements/analysis data and more.
它整合了准确表征材料光学常数所需的参考和分散关系的最亚博网站下载大材料数据库。
Recent enhancements were focussed on automatic modelling operations including automatic fitting procedures and parameterization of dispersion relations for ease of use and speed of analysis. It also incorporates the latest advances in the characterization of periodic structures (1D, 2D gratings).
Fab椭圆计（例如UT-300和FF-1000）以及在线椭圆计（例如滚动监视仪器）也由Deltapsi2软件平台驱动。该软件包括一个全自动操作环境和高级通信协议（RS232，TCP/IP），可用于健壮的薄膜计量控制。Deltapsi2软件提供了对半导体晶圆和玻璃面板，统计分析，高级数据操作，进口/导出软件包功能以及重新处理功能的标准化映射结果的可视化。
Recently, HORIBA Scientific launched the new Auto SE, a fully automatic ellipsometer for quality control of thin films. Driven by the new Auto Soft software package included in the DeltaPsi2 platform, this new innovative software has been designed to provide easy operations of ellipsometric analysis with no compromise on data quality.