The Nebula is Angstrom Engineering’s pinnacle of automation, engineering precision, and collaboration with you, our partner.
这些集成的真空系统专门为满足您的流程和研究需求而设计，并由中央机器人连接，该机器人可以在每个模块上处理多个样品，同时保持真空。
模块的数量和类型由您选择，并为将来的扩展潜力提供了空间。每个模块都可以设计为使用经过验证的组件和子组件来满足您的技术和应用程序要求。我们的目标是提供一个由我们世界知名的客户支持支持的强大，设计的系统。
Substrate Size:200mm x 200mm substrates can be easily accommodated and the modules can be designed for use with larger substrates if desired.
AERES Integrated Software:您有能力在每个过程参数上创建和控制配方，包括：
- Pre-deposition - wafer preparation, source ramp-up, and stabilization
- Layer control - thickness, rate, shuttering, and source idling
- Stage control - heating, cooling, rotation, angle and biasing
- Gas and pressure - pressure stability and precise gas delivery
- Automation - press start and leave the system to do everything
Throughput:将取决于过程持续时间和复杂性。但是，Aeres集成的软件平台优化了层以大大减少整体过程时间。
Module Options
- Multiple vacuum deposition modules are available for PVD, CVD, and ALD
- 使用等离子体或离子束源的底物清洁和制备可以集成到任何过程模块中
- Substrate and mask storage cassette chambers can accommodate 25 or more sample trays as needed
- Support for multiple PVD (physical vapor deposition) processes as well as ALD (atomic layer deposition), and CVD (chemical vapor deposition) integration
- Distribution modules using SCARA robots are sized to meet your needs
- Glovebox environments can be integrated to one or more modules
Standard Key Features
- AERES integrated control software comes standard and boasts the ability to create and control recipes across the entire process, from pre-deposition, through layer control (including unprecedented low-rate stability), stage control, gas and pressure control, and automation
- Custom designed to meet your process requirements
- Multi-user on-site training included with every system
- Our detailed training manual teaches new users how to operate and maintain the equipment
- User safety is held paramount with features such as cutting power to sources when the chamber is open
- Angstrom’s renowned service. We back up our products.
- 8小时响应保证：如果您打电话或电子邮件，我们将在8小时内做出回复，以便您获得所需的支持
Optional Features
- 手套箱集成
- Aluminum or stainless steel chamber options
- International input voltages available
- High-vacuum or ultra-high-vacuum configurations
- Heated, cooled and biased stages
- Planetary and dome fixturing
- Load locks and semi to fully automated substrate and mask handling
- Roll to roll processing
- Variable angle stages for creation of complex nano-structures and coatings for imagery
- Further customization is available. When speaking with our applications engineering team, discuss all requirements with them.
Download the Brochure for More Information
用户推荐
The level of service and connectivity to their customers, answering your emails any time of day, and helping you trouble shoot from afar is above and beyond what I had ever seen before. That interaction is what has made me a die-hard customer from here on out.
凯西·史密斯博士 - 德克萨斯州立大学
We are exceptionally pleased with the two systems we bought from Angstrom and, based on our experience and what I hear from the community, we have made precisely the best decision.
Dr. Luke Brzozowski – University of Toronto