Electrical Resistivity of Thin Metal Films

The physical behaviour of thin films often remarkably deviates from that of the corresponding bulk material. The intent of this book is to report on the electrical, optical, and structural properties of silver and gold films in dependence on substrate material, annealing treatment, and gas adsorption. A main point is the calculation of the scattering cross section of the conduction electrons, which should provide an estimation of the influence of residual gases during the film production as well as the reliability for technical applications such as conducting connections in microelectronics; specially tailored optical elements or supported catalysts are emphasized. All these results are substantiated by extended experimental data, as well as numerous illustrations and tables.

Written for:

• Scientists working in this field

Keywords:

• Electrical and Optical Properties
• Gas Adsorption
• Scattering Hypothesis
• Surface Science
• 薄膜

Table of contents

引入。-散射假设。-退火对薄银膜的电阻率的影响。-退火对薄金膜的电阻率的影响。-氧气和乙烯与银和金膜的相互作用。在银和金膜上。-进一步选择了吸附系统。-结论和展望。