转向Morgan Advanced Materi亚博网站下载als Melbourne，以前是Carpenter Advanced Ceramics，Advanced氧化锆陶瓷，以解决最严重的材料问题。摩根高级材料墨尔本的氧化锆为许多亚博网站下载困难的应用提供了理想的解决方案，在这些应用中，磨损，磨损，撞击，腐蚀和高温导致常规材料失败。摩根高级材料墨尔本获得的专利作品亚博网站下载和高度控制的制造工艺可确保您将拥有最强大，最艰难，最一致的MG-PSZ，您可以在任何地方购买。今天尝试Morgan Advanced 亚博网站下载Materials Melbourne的氧化锆。
Acid Cleaning Of 998 Purity Aluminas
Despite common perception, it seems that not all commercial99.8% pure Alumina oxides相同。尽管它们可能具有相同的化学反应并符合该材料的公认行业规格，但在关键的运营条件下它们的行为可能会有所不同。
Acid Etching Tests of High-Purity Ceramic
最近对七个不同制造商的高纯度陶瓷样品进行了最近加速的酸蚀刻测试。这些测试揭示了酸蚀刻后不同水平的表面粗糙度降解和真空完整性。这应该是一个问题，因为这些特征在表面饰面，细晶粒尺寸，均匀的结构，高密度，耐腐蚀性，可耐腐蚀性和密封质量上具有重要的影响，在氧化铝组件必须承受长期暴露于酸的应用中。相关用途包括半导体工艺，受腐蚀攻击，高速旋转设备，滑动血阀和脱盐操作的广泛工业轴承。app亚博体育
Testing Purity of Aluminas in Semiconductors
The tests were conducted by Morgan Advanced Materials, with subcontractor assistance, specifically to quantify the reactions of commercial 99.8% purity Aluminas to the semiconductor processes employed in recycling after use in manufacturing equipment. This approach recognized the fact that ceramic semiconductor process kit components can be recycled many times after use. Acid etching is commonly performed to recycle Alumina reactor components when process residues need to be removed. The main objective of the test was to simulate and evaluate the effect of multiple use and recovery cycles on a process kit component.
Testing Process Of 998 Purity Aluminas
在测试过程中，将七个不同的998氧化铝样品抛光并在相对侵略性的33/33/33％溶液中浸入10至20分钟，溶液（足以溶解玻璃）的水氟酸，硝酸和去离子水。每个环形测试样品的直径为200毫米乘5 mm厚的厚度为5毫米，两侧抛光到5微英寸RA的表面。
测量表面损伤和粗糙度
为了定量测量由酸引起的表面损伤和粗糙度（RA），使用Stylus介绍仪评估陶瓷样品。真空氦泄漏测试是在酸暴露之前和之后使用定制固定装置进行的。每次泄漏测量后，都使用相同的密封。
氦泄漏测试
抛光到精细的饰面后，将氧化铝样品在超声波和温和的肥皂溶液中清洗10分钟，然后冲洗并干燥。进行了氦泄漏测试，以确保所有样品在酸蚀刻之前都泄漏。使用定制的铝制蛤壳夹具通过密封长度为77厘米，测试样品板两侧的氦泄漏率。Viton 747 O形圈密封件用于所有测试。将样品放入连接到VEECO MS50真空氦分析仪上的固定装置中。
Helium leak tests were run twice, and then the best result of both tests was recorded. Both of the o-rings were cleaned carefully for all tests. Acid-etched samples were professionally cleaned; therefore, they were not touched prior to leak testing or roughness testing.
Surface roughness and helium leak were evaluated for each sample after a total of 10 minutes and 20 minutes of acid exposure. Surface roughness data was based on an average of three measurements taken 2 cm away from the sealing surface.
试验结果
所有经过测试的铝制均显示出20分钟的浓酸暴露后表面粗糙度降解（图1）。然而，七个中的两个仅显示出轻微的表面粗糙。它们在测试中的性能明显优于其他五个样本。
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图1。加速酸蚀刻后，表面粗糙度为99.8％纯度氧化铝试验样品。
One of the two best performers in the roughness tests also exhibited best results in the helium tests (Fig. 2). Another sample, not one of the two leaders in the roughness evaluation, performed nearly as well as the Alumina offering the highest leak integrity. Test sample No. 3 demonstrated poor results in the helium tests, relative to all the other test samples.
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图2。Results of helium leak test on polished Alumina samples after immersion in hydrofluoric, nitric acid and deionized water.
Alumina sample No. 4 was destroyed by an accidental scratch observed to cross the sealing surface. For that reason, 20-minute etching vacuum Helium leak data was not taken.
Summary
测试清楚地表明，在强HF/HNO3酸溶液中，99.8％的纯度铝腐蚀不同。那些表现出表现出优质耐腐蚀性的陶瓷，最能抵抗表面降解并保持真空完整性，可以在许多依赖于高纯度氧化铝的应用中为组件性能提供优势。
显然，如何处理氧化铝可以在性能上有所作为。需要考虑许多因素，因为没有两个纯度铝的制造商以完全相同的方式制造其材料。例如，有不同的技术来平衡二氧化硅含量和工程晶粒边界。这些过程和其他过程应进行研究。
当材料看似相同时，处理可以产生多少差异？亚博网站下载有关改进的证据，请参阅半导体行业。一段时间以来，该行业一直在回收99.8％的纯度铝反应堆组件，以清除残留物，平均三个周期。然后必须更换氧化铝成分。
With an improved grade of Alumina, those semiconductor manufacturers have reported acid etching an average of 10 times before Alumina part replacement is required.
Morgan Advanced 亚博网站下载Materials是Morgan Crucible PLC的子公司，是技术陶瓷，工业陶瓷和高纯度氧化铝和基于氧化氧化铝的结构陶瓷组件的垂直整合制造商。
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